電界放出型冷陰極装置及びその製造方法

Field emission cold cathode device and its manufacturing method

Abstract

<P>PROBLEM TO BE SOLVED: To provide a field emission cold cathode device in which damaging of an emitter tip will not occur, effect of thermal expansion differences between different kinds of materials can be reduced, and manufacturing cost can be lowered. <P>SOLUTION: This is the device in which a cathode electrode part 4 that is equipped with an emitter metal layer 7 in which a plurality of sharp tip emitters 3 are formed on the upper face and that is supported by a support substrate 12, and anode electrodes 5 arranged opposing to the emitters 3 at a prescribedly separated distance are installed in a vacuum state, and this is arranged so that electron discharge is carried out by giving a prescribed electric potential between the anode electrode 5 and the emitter 3 opposing to this. As for the cathode electrode part 4, the upper side protection membrane 8 and a lower side protection membrane 9 of different material quality from that of the emitter metal layer 7 are installed on both of upper and lower faces of the emitter metal layer 7, and at the upper face side protection membrane 8, an emitter aperture 11 is formed above the prescribed part of the emitter 3 opposing to the anode electrode 5. <P>COPYRIGHT: (C)2008,JPO&INPIT
【課題】エミッタの先端を損傷させてしまうことがなく、異材料間での熱膨張差の影響を少なくでき、製造コストが低減できる電界放出型冷陰極装置及びその製造方法を提供することにある。 【解決手段】真空状態の中に、複数の先鋭先端のエミッタ3を上面に形成したエミッタ金属層7を備えて支持基板12に支持されたカソード電極部4と、エミッタ3に所定離間距離を設けて対向配置されたアノード電極5とを設け、アノード電極5とこれに対向するエミッタ3との間に所定電位を与えて電子の放出が行われるようにした装置で、カソード電極部4は、エミッタ金属層7の上下両面に、エミッタ金属層7と異なる材質の上側保護膜8、下側保護膜9が設けられていると共に、上面側保護膜8には、アノード電極5に対向する所定部分のエミッタ3上方に、エミッタ開口11が形成されている。 【選択図】図1

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    Publication numberPublication dateAssigneeTitle
    JP-2015114533-AJune 22, 2015シャープ株式会社, Sharp Corp電子放出素子およびその製造方法